【ASML联合制作】EUV光刻机工作原理全解析
https://www.youtube.com/watch?v=B2482h_TNwg
Inside microchips are nanometer-sized transistors and wires, but how are these nanoscopic structures built? Well, in this video, we’ll explore the EUV Photolithography System built by ASML. This 150-million-dollar machine is essentially a microchip photocopier; it takes the design of a microchip and copies it across hundreds of microchips on a silicon wafer. This EUV Photolithography System is one of the most complex machines ever made, and it encompasses an entire world of science and engineering within it. Specifically in this video, we'll dive deep into the EUV Lithography tool and explore how 13nm EUV light is produced, how the EUV light is focused onto a photomask, how the photomask, or mask, moves around, what the patterns on the mask look like, the projection optics, and how the wafer moves around and the wafer stage. So join us on this adventure into the world of EUV Photolithography! Enjoy!
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